Shenguang Optical Group Co., Ltd. was founded on June 27, 2007, with a registered capital of RMB 144.05 million. Shenguang Optical originated from the "Military 863 Program" in 2002, focusing on the R&D and production of high-quality synthetic fused silica glass for more than 20 years, representing the highest level of quartz glass production technology in China.
Since 2002, the company has been focusing on the development of synthetic UV fused silica glass (Class I, JGS1, ZS) technology. In 2005, the company broke through the bottleneck of large-size fused silica glass production technology and produced the first domestic fused silica glass gross weight of Ф230×1570mm, which created the domestic vertical deposition process for the production of UV fused silica glass, and it is the pioneer and the forerunner of the domestic vertical deposition process. It is the pioneer of vertical deposition process in China and the forerunner, which has changed the situation of backwardness of process technology in the domestic industry for a long time, and promoted the upgrading and rapid development of the industry technology.
The company is committed to independent innovation, focusing on key core technologies, has 39 national patents, and a number of patents to be authorized. The company has undertaken more than 20 national, provincial, ministerial and municipal scientific research projects, the key technical indicators are at the leading level in China and have reached the international advanced level. The company's products are widely used in aerospace, precision optics, photolithography, semiconductors and other applications, is the main supplier of high-end synthetic fused silica glass in China, representing the highest level of synthetic fused silica field in China.
In recent years, the company has made significant progress and landmark achievements in developing photomask substrate products for TFT and chips, and has successfully developed and researched several photomask products for semiconductors, with all technical indexes meeting the standards of users, and has started a new journey towards the semiconductor international industry.
Shenguang Optics has a first-class research and development center and production base, and has carried out in-depth cooperation with many domestic universities and colleges to carry out project research and development and subject research. It has established the "Sichuan Shenguang - Wuhan Polytechnic Optical New Material Technology Research Center" with Wuhan University of Technology and a joint laboratory with Southwest University of Science and Technology. In the industry-university-research cooperation with institutes and universities, Sichuan Shinguang has obtained cutting-edge technical theories and experimental results. In the continuous operation and development, Sichuan Shinguang has accumulated advanced technical resources in the upstream and downstream of the supply chain. In the continuous R&D and innovation, Sichuan Shinguang has gradually realized the key technologies to overcome difficulties.
Industrial chain coordination
The fused quartz glass produced by Shenguang Optical Group is used to replace the import, which is one of the key components in the construction project of the National Ignition Special - inertial Confinement nuclear fusion project of the Chinese Academy of Sciences. The second is for a variety of precision optical system lens, the company has undertaken the 02 special photolithography machine lens research and development tasks. Third, it is used in the semiconductor industry. The mask plate is a high-precision plate engraved with microcircuits, which is made of quartz plate or glass plate with a layer of chromium on the flat surface. The residual chromium part after etching is the designed micrograph, which is a high-precision tool for graphic transfer in the manufacturing process of LCD and semiconductor, and plays a core role in determining the accuracy of downstream products. At present, it is mainly dependent on imports, which will be greatly alleviated by the completion of the new production capacity of 768 tons of Shenguang Optics, the largest in the world. At the same time, the company actively responds to the national strategy of military-civilian integration, continues to overcome difficulties to promote technology transformation, and strives to open up high-end civilian markets such as large-size photomask substrates and domestic lithography machine materials application. - Optical New Material Technology Research Center of Wuhan Institute of Technology ", which has set up a joint laboratory with Southwest University of Science and Technology. In the industry-university-research cooperation with institutes and universities, Sichuan Shinguang has obtained cutting-edge technical theories and experimental results. In the continuous operation and development, Sichuan Shinguang has accumulated advanced technical resources in the upstream and downstream of the supply chain. In the continuous R&D and innovation, Sichuan Shinguang has gradually realized the key technologies to overcome difficulties.
Through years of continuous practice, exploration and summary, Shenguang Optics has made the following achievements with its technological and R&D advantages
It created the first domestic vertical deposition process to produce UV fused quartz glass, changed the situation of the industry technology for a long time behind, and effectively promoted the upgrading and rapid development of the industry technology
The key index of leading products, optical non-uniformity of large diameter fused quartz glass, has achieved a breakthrough of 8×10-7. The performance indicators of the products are at the leading level in China, and the technical maturity has been significantly improved. It is the only unit in China that has reached this quality level, filling the gap in China.
In 2020, he participated in the formulation of the national standard of "High Permeability opaque quartz Glass", leading the industry innovation with technology and leading the industry.
It undertakes two major national projects: National Defense Major 09 project, inertial Confinement fusion ignition Project (Shandang project) and one of the only two suppliers; National major 02 project, research and development of domestic production of restricted key parts of lithography machine -- research and development of optical materials for high NA exposure optical system.