Shenguang Group was invited to attend and speak at the 13th Micro Lithography Technology Exchange Co

  Lithography Technology Exchange Conference  

On August 29-30, 2023, the 4th Annual Meeting of the National Semiconductor Equipment and Materials Standardization Technical Committee and the 13th Microlithography Technology Exchange Conference were successfully held in Qingdao. The conference was hosted by the Secretariat of the Microlithography Branch of the National Semiconductor Equipment and Materials Standardization Technical Committee and the People's Government of Chengyang District, Qingdao.

The opening ceremony of the conference was presided over by Feng Ji, the chairman of the Microlithography Technology Committee. The conference attracted more than 300 senior experts and enterprise representatives from the industry to participate in in-depth exchanges and discussions on the development trends, latest research results, and progress of microlithography technology and its applications, as well as the development trends of microlithography equipment and material technology.

The opening ceremony of the conference was presided over by Feng Ji, the chairman of the Microlithography Technology Committee. The conference attracted more than 300 senior experts and enterprise representatives from the industry to participate in in-depth exchanges and discussions on the development trends, latest research results, and progress of microlithography technology and its applications, as well as the development trends of microlithography equipment and material technology.

At the meeting, Director Cao shared the outstanding advantages of Shenguang from the process research and development system. He horizontally compared the characteristics of processes such as electric melting, gas refining, CVD, VAD, and Plasma, as well as the product layout of foreign brands such as Heli, Corning, and Kohara. He emphasized that the CVD2.0 process system created by Shenguang fully conforms to the current situation of the Chinese market, and this process technology includes various domestically pioneered major advanced technologies. After years of process exploration and accumulation, domestic high-end quartz glass materials can be replaced by imports to prevent potential risks of "neck sticking".

Faced with positive questions from the attending experts, Dean Cao candidly introduced the technical details and industrial chain cooperation situation, and everyone highly agreed with Shenguang's products and viewpoints. Based on a consensus in multiple aspects, Shenguang has formed stable cooperative relationships with domestic semiconductor and lithography machine leading enterprises such as Shanghai Microelectronics and Shaoguang.

From precision instruments to lithography engineering, from integrated circuits to semiconductor manufacturing, from medical devices to industrial lasers, the ubiquitous quartz glass has always played an irreplaceable role and is undoubtedly one of the high-tech core materials! Shenguang Group has always adhered to the "Yu Min Spirit", innovated independently, and is determined to build a world-class optical material enterprise, continuing the new era of national micro lithography technology.